It can be very time consuming for engineers to measure the various features of an X-SEM image of a semiconductor device. These manual measurements of trenches, pillars, lines and spaces can also be inaccurate and there is frequently inconsistency between how engineers do the manual measurements. The collection of data is often very time consuming as well.
With the new PCI-AM (Automated Measurement) module engineers simply click inside the feature and the measurement is done automatically with increased accuracy and consistency among all engineers. The measurement results are displayed on the image and in a spreadsheet grid. The data in the grid can be easily exported into a CSV file suitable for importation into other software such as Microsoft Excel. The images and data can also be easily included in standard Quartz PCI reports with just a few clicks.