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CD Manager
Quartz PCI : CD Manager
A single CD Manager system monitors up to five Hitachi CD-SEMs. As soon as a new measurement result file is generated by any of the tools, it is automatically downloaded, with its associated images, and stored in the Quartz PCI database. Operator intervention is not required. The PCI database fields are populated automatically based on information contained in the result file.
Database Searching
Once the information is in the PCI database, it can be retrieved using PCI’s sophisticated database query functions. Data can be retrieved based on time, instrument, operator, lot number, wafer id, device, process step, class, recipe or any combination of these fields.
A simple query allows you, for example, to retrieve all images and measurement results for a particular wafer at each process step.
Data Management and Security
CD Manager can be programmed to leave data on the tool, delete it immediately upon download or wait a specified number of days after download and delete it from the tool after verification that a copy resides in the PCI database. CD Manager can also send data back to the tool, if necessary. By automating the file maintenance procedure, more efficient use can be made of the storage on the tool. Storage on a central server means that it is easier to ensure that your data is safely and securely backed up.
Network Access
When used in conjunction with PCI client software, data can be retrieved and analyzed at desktop PCs throughout your organization. As soon as data is downloaded from the tool, it is available immediately at the engineer’s desk. When used in conjunction with the PCI Intranet Image Server, the data can be accessed through a web browser on any workstation.
Integrated Data Processing Functions
CD Manager is integrated with the Hitachi Data Processing Software. The Hitachi Data Processing functions are directly available from a menu inside the PCI software. The results of a database query can be used to select measurement files for analysis. This makes it easy to monitor trends over a long period of time. You could, for example, query for all measurements acquired after a particular process step over a certain period of time and then produce a trend plot.
Integration with FA Lab Data
CD Manager is one member of the extensive PCI product line. PCI provides systems for acquiring images from most image producing devices as well as software specifically designed for assisting with lab management in semiconductor analytical labs. By combining data from numerous sources into a single database, it is possible to search the database for ALL images pertaining to a particular lot or wafer. FA lab personnel can easily retrieve the top-view data generated by the CD-SEM for a particular wafer, before they commence work.
PCI Image Enhancement and Annotation Functions
As a member of the PCI family, CD Manager makes available all of PCI’s image enhancement and annotation functions. When it comes time to produce a presentation or report, PCI makes it easy to add annotations to your images or adjust their contrast and brightness settings.
